INFICON Cygnus Thin Film Deposition Controller - Manual (Page 98)

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Cygnus Operating Manual
4.4.2.4.1 Action Definitions (THEN)
NOTE: The following are level outputs and once turned on will remain active until
turned off. This is true even if the Logic string is cleared.
XTL FL INHBT(ON/OFF) ###
CLOCK HOLD (ON/OFF) ##
EXTERN OUT (ON/OFF) ##
RW SAMPLE ON ##
CANCEL TIMER ###
Sets the value of timer ### to zero.
CLEAR COUNTER ###
Clears the designated counter ###
CLOCK HOLD (ON/OFF) ###
This feature "holds" the state timer for the designated Channel ### during any
non-rate control state. These states include the pre-deposit states: Ready,
Crucible Switch, Rise 1, Soak 1, Rise 2, Soak 2; and the post-deposit state: Idle
Ramp. For the feature to be activated the state’s timer must be non-zero. If the
instrument is in the Ready state and a Start command is executed while
CLOCK HOLD is active, the instrument will progress to the first pre-deposit
state with a non-zero state time. If the instrument is in the Crucible Switch state,
waiting for Turret Feedback Input, and CLOCK HOLD is activated, when the
turret positioned input is activated the instrument will progress to the next
pre-deposit state having a non-zero state time. The instrument is prevented
from continuing state processing until the CLOCK HOLD action is turned OFF.
CONTINUE DEP ###
Puts the designated Channel ### into the Deposit state but does not zero the
thickness. This action can not be done from a Ready, Stop, or Crucible Switch
state. If the crystal is failed, this action will put the source into the Time Power
state if the previous state was Non-Deposit Hold, otherwise it is not allowed.
EXTERN OUT (ON/OFF) ###
Designates a hardware output ### and places it into its ON or OFF state.
Outputs can be given names up to 10 characters long. Outputs are named in
the I/O Map display.
GOTO NONDEP CNT ###
Places the designated Channel ### into the Non-Deposit Control state. This
cannot be done from the Ready, Stop, or Crucible Switch states. If the crystal
is failed this action will place the Channel into the Non-Deposit Hold state if the
previous state was Time Power, otherwise it is not allowed.