INFICON Cygnus Thin Film Deposition Controller - Manual (Page 225)

Index - 1
IP
N 07
4-
37
9-
P1
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Cygnus Operating Manual
Index
A
acoustic impedance 9-9
action definitions 4-14
active oscillator 9-6 , 9-8
aerial mass density 9-10
aggregate
rate 3-5
anharmonic 9-2 , 9-7 , 9-9
AT
crystal 9-8
resonator 9-3
Auto Z-Match 9-9
Auto-Z 3-7 , 3-11 , 7-1 , 7-3
averaging time 3-6
C
cable noise 6-7
calibration 7-3
channel display 2-12
channel parameters 3-12 , 5-10
communication
command set 5-7
commands 5-7
remote 5-1
components and assemblies 8-9
control
loop 3-3 , 9-11
system 9-13
control unit installation 6-5
controller
gain 9-13
model 9-11 , 9-13
counters 4-16
cross sensitivity correction 7-4
cross talk percent 3-11 , 7-4
CRT screen 2-1
crystal 9-2
activity value 2-21
fail 3-8
frequency 2-21
frequency spectrum 9-8
life 2-21
quality 3-7
resonance point 9-8
snatcher 8-24
stability 3-8
use history 2-32
crystal replacement 8-20
bakeable 8-22
shuttered and dual 8-21
sputtering 8-23
standard and compact 8-20
crystal switch 2-24
CrystalSix 8-24
Customer Service 1-6
Customer Support
Return Material Authorization 1-6
D
DAC 6-10
data entry 2-1
datalog 2-30
Declaration Of Contamination 1-6
density 7-1
calibration 7-1
value 7-1
density determination 7-1
deviation 3-7
displays 2-4
DTE 6-13
DTR/DSR 5-2
E
earth ground 1-4 , 6-5
connection 6-6
establish 6-5
electrical interference 6-5
electrode-to-quartz bond 9-3
electromagnetic interference 6-10
error code 5-37
error command 5-37
evaporation source. 9-11
F
film-induced stress 9-11
fit, weighted least-square-exponential 9-12
floppy disk 2-29 , 4-19
Frequency Response Method 9-11
function keys 2-1
fundamental 9-7 , 9-8 , 9-9
G
general parameters 5-16
ground 1-4