INFICON Cygnus Thin Film Deposition Controller - Manual (Page 164)

7 - 6
IP
N 07
4-
37
9-
P1
K
Cygnus Operating Manual
7.5.3 Detailed Procedure
Proceed as follows to calculate the amount of cross talk at Sensor Channel N due
to material from Source Channel (N+1):
1 Enter 0.1 into the Rate parameter for Channel N. Enter zero into the Maximum
Power parameter for Channel N.
2 Enter zero into the Cross Talk Percent parameter for Channel (N+1). The value
in the Cross Talk Percent parameter for Channel N should also be zero.
3 Enter the Density and Z-Ratio for the Material in Channel (N+1) into the Density
and Z-Ratio parameters for both materials. Enter a value of Auto-Z parameter
= No for both Channel N and Channel (N+1).
4 Start the co-deposition, allowing Channels N and (N+1) to sequence through
the pre-deposition phases. The power for source Channel (N+1) should be
ramped to the appropriate levels while the power for source Channel N should
be held at 0 %.
5 After Channels N and (N+1) enter DEPOSIT and the rate from source Channel
(N+1) is stable at the desired deposition rate, manually zero the thickness
accumulation for both Channels. This may be done from the All Channel
display by placing the cursor on Channel N and pressing the panel key Zero
Thickness (F2), moving cursor to Channel (N+1) and again pressing the panel
key Zero Thickness (F2) in rapid succession or by using the Zero Thickness
commands via the remote communications or internal logic.
6 Allow a thickness to accumulate for Channels N and (N+1) (on both sensors)
for at least 1 minute. Longer thickness accumulations may be necessary for low
rates and/or to reduce the error introduced by not being able to zero the
thickness for both Channels concurrently. Larger thickness accumulations will
result in a more accurate calculated value.
7 Calculate the Cross Talk Percent value for Channel N using the following
equation: CTP(N) = (Thickness at sensor Channel N / Thickness at sensor
Channel (N+1)) X 100%
8 Enter the calculated value, CTP(N), as the Cross Talk Percent parameter's
value for Channel N. Zero the thickness accumulation for both Channels
concurrently and monitor the thickness accumulation for both Channels.
9 The thickness for Channel N should remain at 0.000 kÅ. Small adjustments of
the value for the Cross Talk Percent may be necessary in order to obtain a zero
thickness accumulation for Channel N.
10 Stop the deposition, allowing the material in source Channel (N+1) to cool
sufficiently so that no material is being deposited. Place the instrument into the
Ready state by pressing Reset.