INFICON Cygnus Thin Film Deposition Controller - Manual (Page 41)

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Cygnus Operating Manual
2.3.1 ALL CHANNELS Display
Figure 2-3 All Channels Display
NOTE: The four channel ALL CHANNELS display is shown when one or two
measurement boards are installed. If three measurement boards are
installed, a six channel ALL CHANNELS display is shown.
ALL CHANNELS Display Description
1 Identifies the channel number associated with the displayed information.
2 Deposition Rate of the channel
3 Accumulated Channel thickness
4 Percent power of individual channel
5 Run time
6 General message area for Test and Lock
7 Power — normal video = level is OK, inverse video = power is at max/min level
and channel is in control.
8 Cumulative thickness for the individual THICK SUM equations defined in the
GENERAL PARAMETER display
9 Rate — normal video = good crystal, inverse video = failed crystal
10 State timer
11 State of individual channel
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