INFICON Cygnus Thin Film Deposition Controller - Manual (Page 96)

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Cygnus Operating Manual
RISE 1 ###
Sets the logic condition to be true at the start of Rise Time 1 for the designated
Channel. If 0 is selected it will apply to any Channel. The condition remains true
until the end of the Rise Time 1.
RISE 2 ###
Sets the logic condition to be true at the start of Rise Time 2 for the designated
Channel. If 0 is selected it will apply to any Channel. The condition remains true
until the end of Rise Time 2.
SOAK 1 ###
Sets the logic condition to be true at the start of Soak Time 1 for the designated
Channel. If 0 is selected it will apply to any Channel. The condition remains true
until the end of Soak Time 1.
SOAK 2 ###
Sets the logic condition to be true at the start of Soak Time 2 for the designated
Channel. If 0 is selected it will apply to any Channel. The condition remains true
until the end of Soak Time 2.
STATEMENT ###
This Event can be used to test when a logic statement becomes “true.” This
allows for linking statements together. A “true” statement is indicated by three
small asterisks below the statement number.
STOP ###
Sets the logic condition to be true as long as the designated Channel is in
STOP. If 0 is selected it will apply to any Channel.The condition remains true
until a RESET or a START command is received.
SUBSTR SHTR ###
Sets the logic condition to be true whenever the substrate shutter output for the
designated source is active. If 0 is selected it will apply to any Channel.
THICK LIMIT # ###
Sets the logic condition to be true once the designated Channel # reaches
Thickness ### value. The condition remains true while the thickness for the
designated Channel is above the Thickness Limit Value.
THICK SUM # ###
Sets the logic condition to be true when the sum of thickness indicated by the
designated Thickness Equation # reaches the thickness value ###.
TIME POWER ###
Sets the logic condition to be true upon entering a Time Power state for the
designated Channel. If 0 is selected it will apply to any Channel.