INFICON MDC-370 Thin Film Deposition Controller User Manual
Page 108
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MDC-370 DEPOSITION CONTROLLER
Figure 8-3 DAC socket connector pin out
Pin Number
Signal
1
Output #1
2
Output #1 Return
3
Output #2
4
Output #2 Return
5
Zero Scale Input
6
Full Scale Input
7
Scale Input Return
Table 8-1 DAC System Interface Connector Pin Assignments
Figure 8-4 Source socket connector pin out
Pin
Signal
Number
Source-Sensor Bd #1
Source-Sensor Bd #2
1
Source #2 Control Voltage
Source #4 Control Voltage
2
Source #2 Return
Source #4 Return
3
Source #1 Return
Source #3 Return
4
Source #1 Control Voltage
Source #3 Control Voltage
Table 8-2 Source Control System Interface Connector Pin Assignments
8-6
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