INFICON MDC-370 Thin Film Deposition Controller User Manual

Page 108

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MDC-370 DEPOSITION CONTROLLER

Figure 8-3 DAC socket connector pin out

Pin Number

Signal

1

Output #1

2

Output #1 Return

3

Output #2

4

Output #2 Return

5

Zero Scale Input

6

Full Scale Input

7

Scale Input Return

Table 8-1 DAC System Interface Connector Pin Assignments

Figure 8-4 Source socket connector pin out

Pin

Signal

Number

Source-Sensor Bd #1

Source-Sensor Bd #2

1

Source #2 Control Voltage

Source #4 Control Voltage

2

Source #2 Return

Source #4 Return

3

Source #1 Return

Source #3 Return

4

Source #1 Control Voltage

Source #3 Control Voltage

Table 8-2 Source Control System Interface Connector Pin Assignments

CONTROLLER INSTALLATION

8-6

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