INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 21)

MDC-370 DEPOSITION CONTROLLER
In the Manual mode the control voltage remains constant unless incremented up
or down by means of the Remote Power Handset. At entry into the Manual mode,
the power is left at the last value prior to entry and is thereafter modified only
through the Remote Power Handset. Exit from the manual mode is accomplished
by means of the Manual or Reset key.
The MDC-370 can also be aborted through the Remote Power Handset. This
abort feature is active whether or not MDC-370 is in the manual mode.
2.3.2 START KEY
The Start key starts a process, starts a layer, or resumes an aborted process. A
green light behind this key indicates the controller is in process. When this key is
pressed the first time a list of stored processes is displayed in the Parameter/Status
window. You simply scroll the cursor on to the desired process and press Start
again to start the process.
2.3.3 ABORT KEY
The Abort key drives the MDC-370 into the Abort mode. All source powers are
set to zero and discrete outputs are set to inactive state. A red light behind this
key indicates the controller is in the abort mode.
2.3.4 RESET KEY
The Reset key is used to clear the controller from Abort mode and put it into the
Ready mode. A yellow light behind this key indicates a Ready mode. The Reset
key is inactive during the In Process mode so that a premature exit from the In
Process mode requires an abort. Caution! Once a process is reset, it cannot be
resumed. So don't reset an aborted process if you want to resume it once the
problem is cleared.
2.3.5 ZERO KEY
Pressing the Zero key causes the thickness display to go to zero. This key is
active at all times and if pressed during the deposit state will result in a film
thicker than that desired by an amount equal to the thickness displayed at the time
the display was zeroed.
2.3.6 SHUTTER KEY
This key is used to manually open and close all source shutters. The red light is
illuminated when the active source shutter relay is closed. This key is only active
when the controller is in the Process Ready mode.
2.3.7 STATUS KEY
Pressing the Status key will bring up one of the two run-time status screens.
Repeatedly pressing the key will cycle through the different status screens. Refer
to Section 5 for a detailed description of these status screens.
FRONT PANEL DISPLAYS AND CONTROLS 2-3