INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 6)

5.2 STARTING A NEW PROCESS ..................................................................................... 5-1
5.3 STARTING A NEW LAYER ......................................................................................... 5-2
5.4 RESUMING AN ABORTED OR HALTED PROCESS ................................................. 5-2
5.5 GR AP H DISPLAYS ........................................................................................................ 5-3
5.6 STATUS DISPLAYS ...................................................................................................... 5-4
5.7 VIEWING RESULTS ..................................................................................................... 5-5
5.8 MODES .......................................................................................................................... 5-7
5.8.1 PROCESS READY...................................................................................................... 5-7
5.8.2 ABORT ....................................................................................................................... 5-7
5.8.3 HALT (SOFT ABORT) ............................................................................................... 5-8
5.8.4 IN PROCESS .............................................................................................................. 5-8
5.8.5 NOT SAMPLING ........................................................................................................ 5-8
5.8.6 PROCESS COMPLETE ............................................................................................. 5-8
5.8.7 MANUAL .................................................................................................................... 5-8
5.8.8 SIMULATE ................................................................................................................. 5-8
5.9 STATES .......................................................................................................................... 5-8
5.10 TROUBLE, ERROR AND WARNING MESSAGES .................................................... 5-8
5.10.1 DESCRIPTION ...................................................................................................... 5-9
5.10.1.1 MIN RATE&MAX POWER........................................................................................ 5-10
5.10.1.2 MAX RATE&MIN POWER........................................................................................ 5-10
5.10.1.3 SYSTEM SETUP MEMORY CORRUPTED .............................................................. 5-10
5.10.1.4 PROCESS MEMORY CORRUPTED ......................................................................... 5-10
5.10.1.5 MATERIAL MEMORY CORRUPTED ...................................................................... 5-10
5.10.1.6 RATE EST. ERROR .................................................................................................... 5-10
5.10.1.7 CRYSTAL FAILURE .................................................................................................. 5-10
5.10.1.8 SOURCE FAULT ........................................................................................................ 5-10
5.10.1.9 SENSOR FAULT ......................................................................................................... 5-11
5.10.1.10 NO SENSORS ENABLED .......................................................................................... 5-11
5.10.1.11 TIME POWER ............................................................................................................. 5-11
5.10.1.12 RATE DEV. ALARM .................................................................................................. 5-11
5.10.1.13 ALARM ACTION ....................................................................................................... 5-11
5.10.1.14 CRYSTAL MARGINAL ............................................................................................. 5-11
5.10.1.15 RATE DEV. ALERT ................................................................................................... 5-11
5.10.1.16 MAX POWER ALERT ................................................................................................ 5-11
5.10.1.17 MIN POWER ALERT ................................................................................................. 5-11
5.10.1.18 ALERT ACTION ......................................................................................................... 5-11
5.10.1.19 XTAL FAIL SWITCH ................................................................................................. 5-12
5.10.1.20 XTAL MRGN SWITCH .............................................................................................. 5-12
5.10.1.21 RATE DEV. ATTEN ................................................................................................... 5-12
5.10.1.22 MAXIMUM POWER .................................................................................................. 5-12
5.10.1.23 MINIMUM POWER .................................................................................................... 5-12
5.10.1.24 CHANGE POCKET... .................................................................................................. 5-12
5.10.1.25 CHANGE CRYSTAL... ............................................................................................... 5-12
5.10.1.26 ATTENTION ACTION ............................................................................................... 5-12
5.10.1.27 CALIBRATION DONE ............................................................................................... 5-12
6. TUNING THE MDC-370 CONTROL LOOP ................................................................. 6-1
6.1 C ONTROL L OOP B ASICS ................................................................................................... 6-1
6.2 C ONTROL L OOPS A PPLIED TO V ACUUM D EPOSITION ....................................................... 6-2
6.3 E STABLISHING MDC-370 C ONTROL L OOP P ARAMETERS ................................................ 6-3
7. INPUT/OUTPUT CHARACTERISTICS ........................................................................ 7-1
7.1 SOURCE CONTROL VOLTAGE OUTPUT ................................................................. 7-1
7.2 SENSOR INPUT ............................................................................................................. 7-1
7.3 DISCRETE OUTPUTS ................................................................................................... 7-1
7.4 DISCRETE INPUTS ....................................................................................................... 7-2
7.5 DIGITAL-TO-ANALOG CONVERTER OUTPUTS .................................................... 7-2
7.6 DIGITAL-TO-ANALOG CONVERTER CONTROL INPUTS ..................................... 7-2
8. CONTROLLER INSTALLATION.................................................................................. 8-1
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