8 instruction summary – INFICON MDC-370 Thin Film Deposition Controller User Manual

Page 134

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MDC-370 DEPOSITION CONTROLLER

5

Invalid message.

6

Process undefined. Can’t add layer.

7

Insufficient layer space. Can’t add layer.

8

Can’t send process log data while in process.

11.8 INSTRUCTION SUMMARY

The following table is a list of valid instruction codes.

Instruction Code

Description

0

Remote activation of controller

1

Send controller configuration parameters

2

Send utility parameters

3

Receive utility parameters

4

Send controller time and date

5

Receive controller time and date

6

Send a material

7

Receive a material

8

Send a material list

9

Send number of undefined layers

10

Send a process

11

Receive a process

12

Delete a process

13

Send a process layer

14

Insert process layer

15

Replace a process layer

16

Delete a process layer

17

Send a process list

18

Send source setup

19

Receive source setup

20

Send sensor setup

21

Receive sensor setup

22

Send Input setup

23

Receive Input setup

24

Send Output setup

25

Receive Output setup

26

Send Action setup

27

Receive Action setup

28

Send controller status

29

Start process

30

Send run-time values

31

Initiate automatic data logging

32

Internal Command

33

Set Active Source Power

34

Internal Command

35

Internal Command

COMPUTER INTERFACE

11-4

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