INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 178)

MDC-370 DEPOSITION CONTROLLER
14.9 DAC SETUP
DAC Output #1
 Rate  Rate Dev.  Power  Thickness
DAC Scale #1
 3 Digit  2 Digit
DAC Output #2
 Rate  Rate Dev.  Power  Thickness
DAC Scale #2
 3 Digit  2 Digit
14.10 UTILITY SETUP
Crystal Frequency
 2.5  3.0  5.0 6.0 9.0 10.0
Simulate Mode
 On  Off
Interface Address
(1-32)
Attention Volume
(0-10)
Alert Volume (0-10)
Alarm Volume (0-10)
Data Points/Min
(ppm)
 30  60  120  300  600
SYSTEM: ENTERED BY: APPROVED BY: DATE: