INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 57)

MDC-370 DEPOSITION CONTROLLER
This parameter determines whether the controller will pause between layers. If
this parameter is set to Yes then the controller will stop on layer complete and
wait for a Start key press from the operator. If this parameter is set to No then the
controller will automatically increment to the next layer.
2. Display Negatives (Enabled, Disabled)
This parameter defines whether the 370 will display negative rates and thickness
or not. If set to disable, the 370 will hold negative values at zero. The default for
this parameters is Disabled.
3. Thickness Graph Scale (2-digit, 3-digit)
This parameter defines whether the rightmost 2 or 3 digits of thickness will be
graphed effectively setting the graph range at either 100 or 1000Å.
4. Sensor Status (Thickness, Frequency)
This parameter determines the value displayed in the Sensor Status screen. The
available options are sensor Thickness or Frequency.
5. Time Display (Estimated State, Layer time or Elapsed Process, Layer or State
time)
This parameter sets the displayed value in the Time display on the front panel.
The choices are estimated state or layer time, or the elapsed process, layer or state
time.
6. Rate Graph (Enabled, Disabled)
This parameter defines whether the rate verses time graph is enabled as one of the
status screens.
7. Power Graph (Enabled, Disabled)
This parameter defines whether the power verses time graph is enabled as one of
the status screens.
8. Thickness Graph (Enabled, Disabled)
This parameter defines whether the thickness verses time graph is enabled as one
of the status screens.
9. Rate Dev. Graph (Enabled, Disabled)
This parameter defines whether the rate deviation verses time graph is enabled as
one of the status screens.
10. Source/Sensor Status (Enabled, Disabled)
This parameter defines whether the source/sensor status screen is enabled as one
of the status screens.
11. I/O Status (Enabled, Disabled)
This parameter defines whether the I/O status screen is enabled as one of the
status screens.
PROGRAMMING AND CONTROLLER SETUP 4-25