INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 55)

MDC-370 DEPOSITION CONTROLLER
This parameter defines how this sensor will be used and what the 370 will do if
this sensor/crystal should fail during a deposit. The available options are as
follows:
1. Not Used - The sensor is not used for this material but may be used as a
backup sensor. If used as a backup and it fails, then it will be put into the
sensor auto complete mode until the end of the layer. In sensor auto
complete mode, the last measure rate for the sensor is used in the average
rate and thickness calculation until the layer is complete. The 370 will
enter the Time Power mode if this sensor if the last to fail.
2. Disable - The sensor is enabled for measurement. The sensor will be
removed from the average measurement if it fails. The 370 will halt the
process if this is the last sensor to fail.
3. HaltLast - The sensor is enabled for measurement. The sensor will be put
into sensor auto complete if it fails and the process will be halted if it is
the last sensor to fail.
4. Halt - The sensor is enabled for measurement but the process will be
halted if this sensor fails.
5. TimePwr - The sensor is enabled for measurement. The sensor will be put
into sensor auto complete if it fails and the 370 will enter the Time Power
Mode if it is the last sensor to fail.
6. Switch - The sensor is enabled for measurement. The 370 will switch to a
backup crystal/sensor if it fails. The Bkup Snsr and Bkup Xtal parameters
set the backup sensor/crystal that the 370 will switch to.
Use the Enter key to cycle between these available options.
d. Xtal (0 to 8)
This parameter sets the primary crystal number for this sensor. This parameter is
used with multiple crystal sensor heads. This parameter cannot be greater than
the Number of Crystals setting for this sensor in the Sensor Setup screen. . The
default setting is 1.
e. Backup Sensor (1 to 6)
This parameter sets the backup sensor input number for this sensor. For a dual
sensor head, this parameter is set to 2 assuming sensor #1 is the primary sensor.
However, for six crystal sensor head, this parameter should be the same as the
sensor # and the Backup Xtal # parameter below would be set to two. This is
because the six crystal sensor head uses only one sensor input to measure any of
its six crystals while the dual sensor head uses two sensor inputs to measure either
crystal.
f. Backup Xtal (1 to 8)
This parameter sets the backup crystal number for the backup sensor.
37. Calibrate Sensors
PROGRAMMING AND CONTROLLER SETUP 4-23