1 material #1 parameters – INFICON MDC-370 Thin Film Deposition Controller User Manual
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MDC-370 DEPOSITION CONTROLLER
3.3.1
MATERIAL #1 PARAMETERS
Material Name
Cr
Source #
1
Pocket #
1
Material Density
07.20 gm/cm
3
Acoustic Impedance
28.95 gm/cm
2
sec
Tooling Factor
100 %
Proportional gain
2400
Integral Time constant
99.9
Derivative Time constant
0.00
Rise to Soak Time
0:00:10 H:MM:SS
Soak Power
5 %
Soak Time
0:00:10
Rise to Predeposit Time
0:00:10
Predeposit Power
9.5 %
Predeposit Time
0:00:05
Rate Establish Time
0 sec
Rate Establish Error
0 %
Deposition Rate #1
10.0 Å/sec
Rate Start Thickness (1 to 4)
100%
Rate Stop Thickness (1 to 4)
100%
Time Setpoint
0
Ramp to Feed Time
0:00:05
Feed Power
7 %
Feed Time
0:00:10
Ramp to Idle Time
0
Idle Power
0
Maximum Power
20 %
Power Alarm Delay
5 sec
Minimum Power
0 %
Rate Deviation Attention
0 %
Rate Deviation Alarm
0 %
Rate Deviation Abort
0 %
Sample Dwell %
100.0 %
Sample Period
0:01:00
Sensor #1
TimePower
Sensor #1 Tooling
70 %
Sensor #1 Weight
100 %
Sensor #1 Crystal #
1
Sensor #1 Backup Sensor #
1
Sensor #1 Backup Crystal #
1
Material Password
0000
BENCH CHECKOUT & INSPECTION
3-2