INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 12)

MDC-370 DEPOSITION CONTROLLER
minimize the possibility of damage in the event of a failure or other problem in
the total deposition system. In addition there are attention, alert and alarm signals
with adjustable volume for trouble and routine operator call.
1.2.7 FAIL SAFE ABORTS
In the event of an MDC-370 failure, as evidenced by unsatisfactory internal
checks, the MDC-370 will abort the process and shut off all outputs. In addition
to the internal checks, the MDC-370 also provides user enabled aborts on
excessive rate control error or crystal failure.
1.2.8 ABORT STATUS RETENTION
In the event that the MDC-370 does abort during the deposition process, pertinent
information is stored at the time of abort. More importantly, the process can be
easily resumed once the problem is corrected without re-programming.
1.2.9 RUN COMPLETION ON CRYSTAL FAILURE
The extensive monitoring and abort functions are designed to protect the system
and/or process from serious and hopefully infrequent malfunctions of the
deposition system. A condition which need not cause an abort is the condition of
crystal failure. The MDC-370 can be set to abort upon crystal failure or run to
completion using a backup crystal or time/power method.
1.2.10 POWERFUL SYSTEM INTERFACE
Fully programmable discrete inputs and outputs permit the MDC-370 to be easily
interfaced into deposition systems controlling the most complex processes. Also,
source control outputs are fully isolated avoiding ground loop problems. The
MDC-370 also supports input from an optical monitor for optical termination of
film thickness.
1.2.11 POWER SUPPLY NOISE TOLERANCE
Integral RFI filter and large energy storage capacitors will tolerate high levels of
power supply noise and power interruptions of 700 ms or less without effect.
1.2.12 INTERNATIONAL STANDARD POWER CONNECTOR
The power connector is internationally approved and meets IEC (International
Electrotechnical Commission) standards. It allows selection of input power
voltages ranging from 100 to 240 volts at a frequency of 50 or 60 Hz and includes
an integral RFI filter.
1.2.13 FIELD UPGRADABLE
Plug-in interface boards and option boards allow the basic unit to be upgraded in
the field to the maximum system level.
GENERAL DESCRIPTION 1-2