INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 149)

MDC-370 DEPOSITION CONTROLLER
28. Receive Action setup (Code #27)
Instructs the controller to enter the incoming Action parameters for Action #n into
memory. A description of the Action parameter list is given above.
Format: Header, Address, Instruction=27, Length=26,Action #(0-15),1 byte
Action Type, 24 byte condition, Checksum
29. Send controller status (Code #28)
Instructs the controller to send the controller status data list. A description of the
controller status data list is as follows:
Parameter Name Length
(bytes)
Range
Controller state 1 0 = Process ready
1 = Start layer
2 = Change pocket
3 = Change crystal
4 = Layer ready
5 = Soak rise
6 = Soak hold
7 = Rise to Predeposit
8 = Predeposit hold
9 = Establish rate
10 = Shutter Delay
11 = Deposit #1
12 = Rate ramp #1
13 = Deposit #2
14 = Rate ramp #2
15 = Deposit #3
16 = Rate ramp #3
17 = Deposit #3
18 = Rate ramp #4
19 = Deposit #5
20 = Ramp to feed
21 = Feed hold
22 = Ramp to idle
23 = Layer complete
24 = Process complete
25 = Process resume
Abort Process Errors 1 Bit 6 = Max Rate&Min Pwr
Bit 7 = Min Rate&Max Pwr
Alarm 1 Errors 1 Bit 0 = Action Setup Corrupted
Bit 1 =Output Setup Corrupted
Bit 2 = Input Setup Corrupted
Bit 3 = Crystal Fail, Process Halted
Bit 4 = Rate Establish Error
Bit 5 = Active Layer Corrupted
Bit 6 = Active Process Corrupted
COMPUTER INTERFACE 11-19