INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 48)

MDC-370 DEPOSITION CONTROLLER
This parameter defines the material for this layer. The layer material is selected
from the list of materials defined in View/Edit material. Therefore, you should
define all of the necessary materials for the process before defining the process.
See EDIT MATERIAL PASSWORD section 4.3.2.
To select a material, move the cursors to the material parameter for that layer and
press the Right-arrow key. The Select Layer Material screen will be displayed as
shown below. Scroll to the desired material and press Enter.
The layer material defaults to 'End Layer' meaning this layer marks the end of the
process.
Figure 4-4 Select Layer Material screen
4.3.2 VIEW/EDIT MATERIAL
From the Main Menu, selecting View/Edit Material will present the Select
Material screen shown below.
Figure 4-5 Select Material screen
4.3.2.1 DEFINE A MATERIAL
Selecting a material for viewing and/or editing will present the screen which
permits the material to be defined, shows the first page of this screen. In this
screen, you define all of the material parameters for the selected material. The
material parameters are described in detail below.
Select Layer Material: 01 >Cr <
02 Au
03
04
05
06
07
to select material 08
↓
Select Material: 01 >Cr <
02 Au
03
04
05
1 - Copy material 06
0 - Delete material 07
- View/Edit material 08
↓
PROGRAMMING AND CONTROLLER SETUP 4-16