1 min rate&max power, 2 max rate&min power, 3 system setup memory corrupted – INFICON MDC-370 Thin Film Deposition Controller User Manual
Page 86: 4 process memory corrupted, 5 material memory corrupted, 6 rate est. error, 7 crystal failure, 8 source fault
MDC-370 DEPOSITION CONTROLLER
5.10.1.1
MIN RATE&MAX POWER
This message indicates that the output power is at the maximum power level set
by the Maximum Power parameter and the rate deviation is below the limit value
set in the Rate Dev. Alarm parameter. When this happens, the controller will go
into the Abort mode and the Alarm will sound.
5.10.1.2
MAX RATE&MIN POWER
This message indicates that the output power is at the minimum power level set
by the Minimum Power parameter, and the rate deviation is above the limit value
set by the Rate Dev. Abort parameter. When this happens, the controller will go
in Abort mode and the Alarm warning will sound.
5.10.1.3
SYSTEM SETUP MEMORY CORRUPTED
The integrity of the System Setup Memory has changed since the last time a
system parameter was modified. Each one of the sub menus and its parameters
has to be checked and corrected as necessary to fix this problem.
5.10.1.4
PROCESS MEMORY CORRUPTED
The integrity of the selected process has been changed since last time the process
was modified. Each one of the process parameters has to be checked and
corrected as necessary to fix this problem.
5.10.1.5
MATERIAL MEMORY CORRUPTED
The integrity of the selected material has been changed since last time the
material was modified. Each one of the material parameters has to be checked
and corrected as necessary to fix this problem.
5.10.1.6
RATE EST. ERROR
The controller is unable to establish the programmed rate within the time
specified in the Rate Establish Time parameter. The rate is considered established
when it stays within the Rate Establish Error % for 5 seconds.
5.10.1.7
CRYSTAL FAILURE
This condition indicates lack of a valid signal from the sensor, and generally
results from a failed crystal but may also indicate problems in the crystal
mounting or the interconnection between the sensor and the controller. If the
primary crystal fails and the process is not in deposit state, the Attention warning
will sound. If the backup crystal fails and the process is not in the deposit state,
the alarm will sound and the process will be halted.
5.10.1.8
SOURCE FAULT
This condition indicates that the correct source pocket position feedback has not
been achieved within the time set by the Rotator Delay parameter (Source Setup
Menu).