INFICON MDC-370 Thin Film Deposition Controller User Manual
Page 82
MDC-370 DEPOSITION CONTROLLER
for longer processes, the user has the ability to change the number of data point
sets stored per minute. The parameter to modify is called Data Points/Min and
can be found in the Utility Setup menu. The following table shows the total
storage time based on the number of data points per minute parameter.
Data Points/Minute
Approx. Storage Time
(minutes)
30
900
60
450
120
225
300
90
600
45
To view a stored process log, select the View Results option from the Main Menu.
This will present a screen with the process log shown in Figure 5-9. From this
screen any of the 16 process logs can be selected for viewing. Note that this
screen is only available if the Internal Data Storage and Time/Date Clock option
installed.
Figure 5-9 View Results Screen
This screen displays the process name, run number, starting time and date and the
status. The status can be either running, normal, aborted or overrun. Overrun
means that this process overran itself within the data store.
To select a process log for viewing, just move the cursors onto the desired process
and press the Enter or the Right-arrow key. Please note that you cannot view a
process log while in process.
Once a process has been selected, the screen will change to the rate vs. time graph
shown in Figure 5-10. The logged data will be plotted for the first layer of the
process. Plotting the data may take from 5 seconds for short layer to up to 15
seconds or more for long layers with a lot of data. Please note that while the data
is being plotted the controller will not read any key presses. When the data has
been plotted the layer number will be displayed in the upper right hand corner of
Process Name Run# Time Date Status
>Sample 0002 12:05 12/28/94 Normal <
Sample 0001 09:54 01/23/95 Aborted
5-6