INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 20)

MDC-370 DEPOSITION CONTROLLER
2.1.5 CRYSTAL HEALTH %
A two-digit display is used to show the health percentage of the active
sensor/crystal. If multiple sensors/crystals are active then the crystal with the
lowest health will be displayed. A fresh crystal starts out with a health of 99%.
2.1.6 TIME DISPLAY
Time is displayed in hours, minutes and seconds. This display can be configured
to show the estimated time to go for the state or layer or the elapsed process, layer
or state times.
2.2 PARAMETER/STATUS DISPLAYS
A graphics display labeled Parameter/Status is used for process programming and
controller setup as well as displaying run-time status and data graphing. The
operator can switch between programming screens and status screens by pressing
the Program and Status keys on the front panel. Upon power up, the
Parameter/Status display automatically reverts to the last viewed status screen.
Detail descriptions of the different programming and status screens can be found
in Section 4 and 5.
Figure 2-2 Parameter/Status Display
2.3 OPERATING CONTROLS
Normal operation of the MDC-370 is controlled by seven operating keys, Manual,
Start, Abort, Reset, Zero, Shutter and Status. Except for the Zero and Status keys,
each of the other keys is equipped with an LED to indicate the controller’s status.
2.3.1 MANUAL KEY
This key is used to toggle the MDC-370 Manual mode on and off. A red light
behind this key indicates the controller is in manual power control mode. This
mode may be selected at any time providing that the controller is not in Abort
mode. The Manual mode indicates that the source control voltage output for the
active source is being controlled through the Remote Power Handset. (The active
source is set by the active material's Source parameter).
Sample Cr Process Ready
10
R
a
t
e
0 1
Displays the current
process name.
Displays the current
material name.
Displays the
controller modes,
states or troubles.
Displays the time
axis scale factor
FRONT PANEL DISPLAYS AND CONTROLS 2-2