INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 143)

MDC-370 DEPOSITION CONTROLLER
Format: Header, Address, Instruction=16, Length=3, 1 byte Process #(0-98), 2
byte Layer #(0-998), Checksum.
18. Send process list (Code #17)
Instructs the controller to send all process names in the order that they are stored
in the controller. The process list consists of 99 12 character process names.
Example: To instruct the controller to send the process list the computer would
send:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(17)+Chr$(0)+Chr$(238)
Since the MDC’s message length is limited to 249 bytes, the controller will send
the process names in five separate messages. The first four messages will each
contain 20 names and the last message will contain 19 names.
19. Send source setup (Code #18)
Instructs the controller to send the source setup parameter list for all sources. A
description of the source parameter list is as follows:
Parameter Name Length
(bytes)
Decimal Pt.
Position
Range Units
Number of Pockets 1 * (1-8) None
Shutter Relay Type 1 * 44=Normally open,
45=Normally closed,
46=None None
Control 1 * 68=Direct,
69=BCD,
70=Indiv,
71=Manual None
Drive 1 * 60=Up,
61=Down,
62=Fast,
63=Inline,
64=Sngl Step,
65=Dbl Step None
Feedback input type 1 * 8 =Individual,
9=BCD,
10=Single Home,
11=In Position,
12=No Feedback
Rotator Delay 1 * (0-99) seconds
Source voltage range 1 * (16=2.5V, 17=5.0V,
18=10V) Volts
Shutter Delay 2 * (0-99) LSByte first .1 sec
Total 9 bytes
There are a total of six sources with 9 bytes per source for a total of 54 bytes. All
54 bytes are sent in the same message starting with source #1.
COMPUTER INTERFACE 11-13