INFICON MDC-370 Thin Film Deposition Controller User Manual

Page 142

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MDC-370 DEPOSITION CONTROLLER

Chr$(255)+Chr$(254)+Chr$(1)+Chr$(12)+Chr$(1)+Chr$(15)+Chr$(227)

14. Send process layer (Code #13)

Instructs the controller to send the process layer parameters for process # n layer #
y
to the host computer. A description of the process layer parameter list is as
follows:

Parameter Name

Length (bytes)

Decimal Pt.

Position

Range

Units

Process #

1

*

(0-98)

None

Layer #

2

*

(0-998)

None

Layer # n Thickness

3

3

(0-999900) Å

Layer # n Material #

1

*

(0-31)

None

Total 7 bytes

Format: Header, Address, Instruction=13, Length=3, 1 byte Process #, 2 byte
Layer #, Checksum.

Example: To instruct the controller to send the process layer parameters for
process #15 layer #5 the computer would send:

Chr$(255)+Chr$(254)+Chr$(1)+Chr$(13)+Chr$(3)+Chr$(15)+Chr$(0)+C
hr$(5)+ Chr$(219)

15. Insert process layer (Code #14)

Instructs the controller to insert the incoming layer parameters of process # n in
front of layer # y adding the layer to the process. A description of the insert
process layer parameter list is as follows:

Parameter Name

Length (bytes)

Decimal Pt.

Position

Range

Units

Process #

1

*

(0-98)

None

Layer #

2

*

(0-998)

None

Layer # n Thickness

3

3

(0-999900) Å

Layer # n Material #

1

*

(0-31)

None

Total 7 bytes

If all of the layers are defined then the controller will respond with and
insufficient layer space error.

16. Replace process layer (Code #15)

Instructs the controller to enter the incoming process layer parameters into
process # n layer # y. A description of the process layer parameter list is given
above.

Writing a layer to an undefined process results in an error. To define a process,
use the Receive Process instruction.

17. Delete process layer (Code #16)

Instructs the controller to delete later # y from process # n.

COMPUTER INTERFACE

11-12

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