INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 79)

MDC-370 DEPOSITION CONTROLLER
5.5 GRAPH DISPLAYS
There are four different run time graph screens that can be displayed at any time
by pressing the Graph key (providing they have each been enabled in the Edit
Display Setup menu). The first key press will bring up the last viewed graph
screen, repeatedly pressing the Graph key will cycle through the four graph
screens, shown below.
Figure 5-3 Rate vs. Time Graph
Figure 5-4 Rate Deviation vs. Time graph
Figure 5-5 Thickness vs. Time Graph
Sample Cr Process Ready
10
R
a
t
e
0 1
Sample Cr Process Ready
20
R D
a e
t v 1
e %
0
Sample Cr Process Ready
999
T
h
i
c
k
0 1
Displays the current
process name.
Displays the current
material name.
OPERATING THE MDC-370 5-3