INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 45)

MDC-370 DEPOSITION CONTROLLER
4.2.7.5 RATE SAMPLE MODE
Rate sample feature is designed for large deposition thicknesses where crystal life
is a problem. By sampling the rate periodically to maintain rate control, then
closing the sensor shutter with the rate and power level constant, a large
deposition thickness can be achieved with one crystal.
To enable the rate sample feature, set the Sample Dwell% parameter to the
percentage of time you wish the controller to sample the rate. Then set the
Sample Period parameter to the time period of the sample and not sampling
period.
4.2.7.6 RATE DEVIATION ALARM
The MDC-370 provides three rate deviation levels to trigger an attention sound,
an alarm sound, or a process abort. The attention and alarm sounds are
momentarily triggered meaning they will sound when the error is exceeded and
clear when within the limit. The process will abort when the abort level is
exceeded and the power is at the maximum or minimum power.
4.2.8 PROCESS SETUP
The final step in the initial setup of the controller is to define the processes that
you wish to run. To define a process you should complete the following steps:
1. Select a blank process from the Select Process Screen. Please note that you
can also copy and modify a similar process to save time.
2. Enter a process name in the Define Process Screen.
3. Move the cursor onto the layer thickness parameter and enter the desired
thickness for the layer.
4. Select a material for the layer by moving the cursor onto the material column,
pressing the right arrow key, moving the cursor onto the desired material for
the layer and pressing the Enter key.
Repeat steps 3&4 until the process layers are complete.
4.2.9 STARTING A NEW PROCESS
To start a new process, the controller must be in the Process Ready State. If not,
press abort then reset. From the ready state, press the Start key, move the cursor
onto the desired process and press start again to start the process. To start a
process from a layer other layer #1, press the left arrow key to move the cursor
onto the Starting Layer parameter, enter the desired layer number, move back to
the desired process and press Start again. Please note that you can also change the
process Run Number from the Start Process screen.
4.2.10 RESUMING A PROCESS FROM ABORT OR HALT
To resume an aborted process, first press the start key. A message will appear
asking you to press the start key again to resume the process. The process will
resume from the layer where the process was aborted starting in either the Rise to
PROGRAMMING AND CONTROLLER SETUP 4-13