INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 53)

MDC-370 DEPOSITION CONTROLLER
26. Ramp To Idle Time (0 to 9:59:59)
This parameter defines the time allowed for the source power to go from the last
deposition power or feed power to the Idle Power. The default for this parameter
is zero.
27. Idle Power (00.0 to 99.9%)
This parameter defines the source power after the feed or deposit states until the
next Soak or abort state. If the idle power is greater than zero then the next layer
using this source and pocket will start from the Predeposit state. If any
subsequent layer uses the same source but a different pocket, the idle power will
be automatically set to zero.
28. Maximum Power (00.0 to 99.9%)
The maximum power parameter sets the maximum allowable source power for
this material. The deposition power will not be allowed to exceed this value.
29. Power Alarm Delay (0 to 99)
This parameter sets the time required for the deposit power to be at Maximum or
Minimum power before the alarm will be triggered.
30. Minimum Power (00.0 to 99.9%)
This parameter sets the minimum power level for the minimum power warnings.
If the power is at or below this level during a deposit a Minimum Power attention
warning will be given. If this condition remains true for longer than the time set
by the Power Alarm Delay parameter then a Minimum Power Alert warning will
be given.
31. Rate Dev. Attention (00.0 to 99.9%)
The rate deviation attention parameter sets the allowable percent deviation from
the deposition rate. If the deposition rate deviates by more than this percentage
during the deposition, than a rate deviation attention message will be displayed in
the Parameter/Status display. The default setting of 00.0% disables this function.
32. Rate Dev. Alarm (00.0 to 99.9%)
This parameter sets the percent deviation from the deposition rate required to
trigger a rate deviation alarm. The default setting of 00.0% disables this function.
33. Rate Dev. Abort (00.0 to 99.9%)
The rate deviation abort parameter sets the allowable percent deviation from the
deposition rate. If the deposition rate deviates by more than this percentage and
the deposit power is at the maximum or minimum power alert level then the
process will be aborted. The default setting of 00.0% disables this function.
34. Sample Dwell% (000.0 to 100.0)
The Sample Dwell% parameter establishes the percentage of the Sample Time for
which the crystal is being sampled. Rate sampling is used for high deposition
thickness where crystal life is a problem. By sampling the rate periodically and
setting the power level to establish rate control, then closing the crystal shutter
PROGRAMMING AND CONTROLLER SETUP 4-21