INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 87)

MDC-370 DEPOSITION CONTROLLER
5.10.1.9 SENSOR FAULT
This condition indicates that the correct crystal position feedback has not been
achieved within the time set by the Rotator Delay parameter (Sensor Setup
Menu).
5.10.1.10 NO SENSORS ENABLED
This condition indicates that no sensors were enabled for measurement of this
material.
5.10.1.11 TIME POWER
This message is displayed when the controller is completing the current layer
based on the last power and rate. This occurs in the event of a crystal failure
without a backup.
5.10.1.12 RATE DEV. ALARM
The deposition rate error is greater than the rate deviation value set in the Rate
Deviation Alarm parameter.
5.10.1.13 ALARM ACTION
This message indicates the Alarm sound was initiated by an internal action.
5.10.1.14 CRYSTAL MARGINAL
The sensor crystal in use is poor in quality. If the crystal is the backup one, the
Alert warning will sound when the process is in deposit state. If the primary
crystal is in poor quality then the Attention will sound.
5.10.1.15 RATE DEV. ALERT
The deposition rate deviation is greater than the value set in the Rate Deviation
Alert parameter.
5.10.1.16 MAX POWER ALERT
Indicates that the power output level has been at the Maximum Power level longer
than the time period set in the Power Alert Delay parameter.
5.10.1.17 MIN POWER ALERT
Indicates that the power output level has been at or below the Minimum Power
level longer than the time period set in the Power Alert Delay parameter.
5.10.1.18 ALERT ACTION
This message indicates the Alert sound was initiated by an internal action.
OPERATING THE MDC-370 5-11