INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 180)

MDC-370 DEPOSITION CONTROLLER
sensor head installation, 9-2
sensor oscillator, 9-2
typical system installation, 9-4
installing option boards. See option
boards
internal data storage, 5-5, 5-6
M
manual key. See manual operation
manual operation, 3-4
material setup, 4-11
menu structure. See navigating the menu
structure
modes, 5-7
abort, 5-7
halt (soft abort), 5-8
in process, 5-8
manual, 5-8
not sampling, 5-8
process complete, 5-8
process ready, 5-7
simulate, 5-8
N
navigating the menu structure, 4-1
O
operating keys, 2-2, 5-7
Abort, 2-3
Alphanumeric Keyboard, 2-5
Arrow, 2-4
Graph, 2-4
Manual, 2-2
Program, 2-4
Reset, 2-3
Shutter, 2-3
Start, 2-3
Status, 2-4
Zero, 2-3
optical monitor termination, 4-10
option boards, 3-4
I/O board, 3-5
IEEE-488 option board, 3-5
source-sensor board, 3-5
overshoot. See thickness overshoot
P
Parameter/Status display, 2-2, 2-4, 3-1,
4-3, 4-22, 4-35, 5-1, 5-7, 12-2
password protection, 4-2
edit material password, 4-3
edit process password, 4-3
view/run process password, 4-3
pause on layer complete, 4-11, 4-25
power ramp, 4-12
process setup, 4-13
programming sequence, 4-4
programming, detailed, 4-14
edit DAC setup, 4-41
edit display setup, 4-25
edit sensor setup, 4-35
edit source setup, 4-38
edit utility setup, 4-42
program actions, 4-33
program inputs, 4-26
program outputs, 4-27
system setup, 4-24
view/edit material, 4-16
view/edit process, 4-14
R
rate deviation alarm, 4-13
rate establish, 4-12
rate ramp, 4-12
rate sample mode, 4-13
remote power handset, 1-6, 1-8, 2-3, 3-4,
3-7, 5-8, 8-1, 8-2, 12-3
resuming a process from abort or halt, 4-
14, 5-2
RSH-600 example, 4-9
run time graph screens. See graph
displays
S
sample program, 3-1
sensor crystal replacement. See
sensor setup, 4-7
position control, 4-8
sign-on screen, 5-1
Simulate mode, 3-1, 3-4, 3-6, 4-4, 4-43
source
INDEX 12