INFICON MDC-370 Thin Film Deposition Controller User Manual

Page 75

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MDC-370 DEPOSITION CONTROLLER

to the extent that the Thickness and Rate displays are derived from a simulated
sensor input rather that the actual sensor. While in this mode, the simulated
thickness build- up is directly proportional to the displayed power level and
independent of actual thickness on the sensor. The Simulate mode allows the
total deposit process to be simulated. It also allows the tooling factor, density and
acoustic impedance calculations to be conveniently checked and altered at the end
of the run, if necessary.

3. Interface Address. (1-32)

This parameter sets the controller’s computer interface address for the RS-485
and IEEE-488 interfaces.

4. Attention Volume (0-10)

This parameter sets the volume of audio attention sound. Attention sounds
indicate that the controller is waiting for an operator response or action before
continuing the process. A setting of zero disables audio attention sound.

5. Alert Volume (0-10)

This parameter sets the volume of audio alert sound. Alert sounds indicate that a
material alert level has been exceeded. A setting of zero disables audio alert
sounds.

6. Alarm Volume (0-10)

This parameter sets the volume of audio alarm sound. Alarm sounds indicate that
a material alarm level has been exceeded. A setting of zero disables audio alarm
sounds.

7. Data Points/Min (30,60,120,300,600 PPM)

This parameter sets the number of run-time data point sets per minute that will be
written to the process log. The default is 600 data points/minute. During a
process, data is logged automatically up to 10 data point sets per minute. At this
rate the 27,000 data point storage can hold 45 minutes of data. To allow for
longer processes, you can change the number of data point sets stored per minute.
The following table shows the approximate storage time based on the number of
data points per minute parameter. Press the ‘Enter’ key to cycle between options.
This parameter is only visible when the data logging option is installed.

PROGRAMMING AND CONTROLLER SETUP

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