INFICON MDC-370 Thin Film Deposition Controller User Manual

Page 141

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MDC-370 DEPOSITION CONTROLLER

Number of Layers

2

*

(0-998)

None

Total

23

bytes

All of the layer data for process #n will follow the above message. Since the
MDC-370’s message length is limited to 249 bytes, the controller will send the
layer data in from one up to 17 separate messages depending on the number of
layers in the process. Each message will contain from one to 60 layers. For
example, if the process contains 250 layers, the controller will send the layer data
in five messages. The first four messages will have 60 layers and the last message
will have 10 layers. The format of the layer messages is as follows:

Parameter Name

Length (bytes)

Decimal Pt.

Position

Range

Units

Message Number

1

*

(1-17)

None

Layer # n Thickness

3

3

(0-999900) Å

Layer # n Material #

1

*

(0-31)

None

The message number is included as a safeguard to insure that the all messages are
received and are in order.

Example: To instruct the controller to send the process parameters for process
#15 the computer would send:

Chr$(255)+Chr$(254)+Chr$(1)+Chr$(10)+Chr$(1)+Chr$(15)+Chr$(229)

12. Receive process (Code #11)

Instructs the controller to enter the incoming parameters of process # n into
memory. A description of the process parameter list is as follows:

Parameter Name

Length (bytes)

Decimal Pt.

Position

Range

Units

Process #

1

*

(0-98)

None

Process Name

12

*

Character

None

Edit Password

4

*

Character

None

View/Run Password

4

*

Character

None

Total 21 bytes

Format: Header, Address, Instruction=11, Length=21, 1 byte process#(0-98), 12
byte Process name (ASCII), 4 byte Edit Password, 4 byte View/Run Password,
Checksum.

To modify process layers you must use the insert, replace, and delete process
layer instructions.

13. Delete process (Code #12)

Instructs the controller to delete process# n and its associated layers.

Example: To instruct the controller to delete process# 15 the computer would
send:

COMPUTER INTERFACE 11-11

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