INFICON MDC-370 Thin Film Deposition Controller User Manual

Page 157

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MDC-370 DEPOSITION CONTROLLER

Completion Status

1

(0=Normal, 1=Aborted,
2=Running, 3=Overrun)

Data Points/Minute

1

(38=30ppm, 39=60ppm,
40=120ppm, 41=300ppm,
42=600ppm)

Starting Layer Number

2

(0-999)

Ending Layer Number

2

(0-999)

Total 29 bytes

The time and date data is in an unpacked BCD format. The four most significant
bits of a byte is the first digit’s value and the four least significant bits is the
second digit’s value. For example, a byte value of 41 decimal equates to a first
digit of 2 and a second digit of 9. The 2 comes from the four MSbits and the 9
comes from the four LSbits of the byte.

The process run number and the starting and ending layer numbers are in the
normal MSbyte first BCD format.

If the first byte of the process name of any process log is equal to 255 then that
log is considered blank.

Since the MDC’s message length is limited to 249 bytes, the controller will send
the process log directory data in two separate 232 byte messages. The first
message will contain the first eight logs and the second message will contain the
last eight logs.

Example: To instruct the controller to send the process log directory the
computer would send:

Chr$(255)+Chr$(254)+Chr$(1)+Chr$(36)+Chr$(0)+Chr$(219)

38. Send Process Log Data (Code #37)

Instructs the controller to send the process log data for log #n and layer #y to the
host computer. This command is only valid on controllers with the internal data
log storage option installed. The process log number can range from 1-16 and the
layer number can range from 1 to 999. Trying to read an empty process log or a
layer that doesn’t exist will result in parameter out of range error. The layer data
for a process log is sent in two message types. The first type holds the layer
material name and the number of data point sets stored. The second type holds
the data point set data. The following table shows the data format of the layer
material message type:

COMPUTER INTERFACE 11-27

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