INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 81)

MDC-370 DEPOSITION CONTROLLER
Enter. The 370 will enter the Change Pocket State where it will remain until the
desired pocket is in position or a Source Fault occurs.
You change the sensor crystal position by moving the cursor onto the crystal
number of the desired sensor, enter the new crystal number and press Enter. The
370 will enter the Change Crystal State where it will remain until the desired
crystal is in position or a Sensor Fault occurs.
You change the active sensor by moving onto the current active sensor, enter the
new sensor number and press Enter. The active sensor as indicated by the * will
change to the selected sensor.
Figure 5-8 I/O Status Screen
The I/O status screen indicates the state of all the 370's inputs and outputs. Please
note that you can use the arrow keys to scroll up and down the I/O listing.
5.7 VIEWING RESULTS
The MDC-370 has an optional Internal Data Storage capability that provides
internal storage of real time run data. Stored data can later be viewed through the
four status graphs or can be downloaded to a PC for permanent storage and/or
review.
The data log option provides storage for up to 16 process logs and/or 27,000 data
point sets of real time run data. A process log consists of the process name, run
number, starting time and date, ending time and the completion status of the run.
The process logs are stored in a stack such that newest process is at the top of the
stack and the oldest process is at the bottom of the stack. The start of the next
process will push all of the logs down one position on the stack. The last or 16th
process log on the stack will be lost.
A data point set consists of the measured deposit rate, rate deviation, thickness
and the deposit power. The 27,000 data point sets are stored in a circular buffer
such that new data will overwrite the oldest data. If data from the current process
overwrites an older process than that entire process will be erased. If data from
the current process tries to overwrite the start of the current process then data
logging is stopped so that the beginning of the process is saved.
During a process, data is logged automatically up to 10 data point sets per minute.
At this rate the 27,000 data point storage can hold 45 minutes of data. To allow
Sample Cr Process Ready
Input State Output State
01>Name F F<
02 F F
03 F F
04 F F
05 F F
06 F F
OPERATING THE MDC-370 5-5