INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 66)

MDC-370 DEPOSITION CONTROLLER
In this screen you can select a predefined action from the list by moving the
cursors onto the desired action and pressing Enter. The following is a list of the
predefined actions:
No Action - No action is taken. The default setting.
Manual - Functionally identical to pressing Manual key.
Zero - Functionally identical to pressing Zero key.
Reset - Functionally identical to pressing Reset key.
Abort - Functionally identical to pressing Abort key.
Halt - Halts the process, sets active source power to idle, and leaves all other
source powers unchanged.
Terminate Deposit - Triggers the final thickness for the deposit state. Action is
ignored if state is not a deposit state.
Hold In State - Holds controller in current state.
Step From State - Steps controller to next state.
Sound Attention - Triggers the attention sound and displays the "Attention
Action" message in the State/Trouble field in the Parameter/Status display.
Sound Alert - Triggers the Alert sound and displays the "Alert Action" message
in the State/Trouble field in the Parameter/Status display.
Sound Alarm - Triggers the Alarm sound and displays the message "Alarm
Action" in the State/Trouble field of the Parameter/Status display.
Start Process - Trigger the start of the currently selected process. This action is
ignored unless the controller is in the Process Ready state.
Select Process 1-8 - Select process #1-8 as the next process to be started by the
Start Process action described above.
Switch Crystals - Toggles between the primary and the backup sensor/crystal
combination defined by the active material. The first sensor/crystal will be
switched if more than one sensor/crystal combinations are enabled for
measurement.
Select Defined Action: 01 >No Action <
02 Manual Power
03 Zero Thickness
04 Reset Controller
05 Abort Process
06 Halt Process
07 TerminateDeposit
to select 08 Hold In State ↓
PROGRAMMING AND CONTROLLER SETUP 4-34