INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 7)

8.1 MOUNTING ...................................................................................................................8-1
8.2 PROPER GROUNDING .................................................................................................8-1
8.3 EXTERNAL CONNECTIONS .......................................................................................8-1
8.3.1 POWER .......................................................................................................................8-1
8.3.2 VOLTAGE SELECTION .............................................................................................8-1
8.3.3 GROUND LUG ...........................................................................................................8-2
8.3.4 REMOTE POWER HANDSET ....................................................................................8-2
8.3.5 SOURCE-SENSOR .....................................................................................................8-2
8.3.6 RS-232 COMMUNICATION .......................................................................................8-2
8.3.7 DISCRETE INPUT/OUTPUT .....................................................................................8-3
8.3.8 DIGITAL-TO-ANALOG CONVERTER (DAC) ...........................................................8-3
9. SYSTEM INSTALLATION ..............................................................................................9-1
9.1 SENSOR HEAD DESCRIPTION ...................................................................................9-1
9.2 SENSOR HEAD INSTALLATION ................................................................................9-1
9.3 SENSOR OSCILLATOR ................................................................................................9-2
9.3.1 INSTALLATION ..........................................................................................................9-3
9.4 INSTRUMENTATION FEEDTHROUGH .....................................................................9-3
9.5 SENSOR CRYSTAL REPLACEMENT .........................................................................9-3
9.6 TYPICAL SYSTEM INSTALLATION ..........................................................................9-4
10. THEORY OF OPERATION ......................................................................................10-1
10.1 BASIC MEASUREMENT ............................................................................................10-1
10.2 FILM THICKNESS CALCULATION ..........................................................................10-1
10.3 CRYSTAL HEALTH CALCULATION .......................................................................10-3
10.4 RATE CALCULATION ................................................................................................10-4
10.5 M ULTI - SENSOR AVERAGING ...........................................................................................10-4
10.6 EMPIRICAL CALIBRATION ......................................................................................10-5
10.6.1 FILM DENSITY ....................................................................................................10-5
10.6.2 TOOLING FACTOR .............................................................................................10-6
10.6.3 ACOUSTIC IMPEDANCE ...................................................................................10-6
11. COMPUTER INTERFACE ........................................................................................11-1
11.1 GENERAL .....................................................................................................................11-1
11.2 RS-232 SERIAL INTERFACE ......................................................................................11-1
11.3 RS-485 SERIAL INTERFACE ......................................................................................11-1
11.4 IEEE-488 PARALLEL INTERFACE............................................................................11-2
11.5 PROTOCOL ..................................................................................................................11-2
11.6 DATA TYPES ...............................................................................................................11-3
11.7 MESSAGE RECEIVED STATUS ................................................................................11-3
11.8 INSTRUCTION SUMMARY .......................................................................................11-4
11.9 INSTRUCTION DESCRIPTIONS ................................................................................11-5
12. REPAIR AND MAINTENANCE ...............................................................................12-1
12.1 HANDLING PRECAUTIONS ......................................................................................12-1
12.2 MAINTENANCE PHILOSOPHY ................................................................................12-1
12.3 TROUBLE SHOOTING AIDS ......................................................................................12-2
12.4 RETURNING THE MDC-370 TO THE FACTORY .....................................................12-3
13. APPENDIX A ...............................................................................................................13-1
14. APPENDIX B – PARAMETER TEMPLATES ........................................................14-1
14.1 MATERIAL ...................................................................................................................14-2
14.2 PROCESS ......................................................................................................................14-4
14.3 DISPLAY SETUP .........................................................................................................14-5
14.4 INPUTS .........................................................................................................................14-6
14.5 OUTPUTS .....................................................................................................................14-7
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