INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 68)

MDC-370 DEPOSITION CONTROLLER
None - No sensor shutter output is created.
Dual - Select this type for a dual sensor head. For this type, a “Dual Snsr1&2
Shtr” output will be created to interface to the shutter actuator.
3. Control (Manual, Direct, BCD, Indiv)
This parameter defines the type of crystal position control utilized.
Manual, as it implies, means not under control of the MDC-370. Under manual
control, the MDC-370 will stop the process upon the completion of the current
layer when the next layer requires a different crystal position. A message
prompting the operator with the number of the crystal required is displayed in the
Parameter/Status window. Once the crystal has been changed, the process is
resumed by pressing the Start key.
BCD and Indiv are used when control is through an external crystal rotation
controller which accepts Binary Coded Decimal inputs or Individual switch
closures to select the crystal. The controller creates the number of outputs
required to interface with the external controller and set the outputs as required to
signal a crystal
Direct is used when the actuating device is driven directly. In this case the
controller creates one or two outputs, one for each available direction, to drive a
motor or solenoid.
4. Drive (Up, Down, Fast, Inline, Sngl Step, Dbl Step)
This parameter defines the drive method or direction for Direct control and only
has an effect when Control type is set to Direct. The different settings are
described below.
Up, Down, Fast and Inline - These four settings are typically used with multi-
crystal heads that use a motor to rotate the crystals into position. With Up
selected, the controller will create one output called "SensorN Drive Up". The
370 will activate this output to increment the sensor head up to the next
position. The down selection works the same except the output is called
"SensorN Drive Dn". With Fast selected, the controller will create both an up
and a down output. The 370 will then determine the fastest direction to the
target crystal position by activating the appropriate output. The Inline drive
type informs the controller that continuous travel in one direction is not
possible. Therefor to get from position 6 to 1, the direction must be down
through 5, 4, etc. until 1 is reached.
SnglStep and Dbl Step - Both the SnglStep and Dbl Step settings are typically
used with multi-crystal sensor heads that are actuated by pulsing a pneumatic
valve. The 370 will create a "SensorX Drive Up" which is either singly or
doubly pulsed to sequentially step the sensor head to the next position.
5. Feedback Type (Individual, BCD, Single Home, In Position, No Feedback)
This parameter defines the type of feedback for a multiple sensor head. The three
feedback types available are as follows:
PROGRAMMING AND CONTROLLER SETUP 4-36