INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 84)

MDC-370 DEPOSITION CONTROLLER
5.8.3 HALT (SOFT ABORT)
In Halt all I/O is frozen. If power is above Soak level, it is ramped down to Soak
at the Predeposit ramp rate. If Power is at or below the Soak level it is held
constant. The user has the option to resume from Halt or press Reset and start
over. See also Section 5.4 for resuming a halted process. Refer to Table 5-1 for
conditions that can cause the process to halt.
5.8.4 IN PROCESS
The green LED behind the Start key indicates the controller is in the In-Process
Mode.
5.8.5 NOT SAMPLING
This mode indicates that the sensor crystal is shuttered from the source and that
the deposition rate is established using the last power level. Sampling mode is set
by two material parameters, Sample Dwell % and Sample Period. Refer to
Section 4.3.2.1 # 44 and # 45 for a description of Sample Mode.
5.8.6 PROCESS COMPLETE
This mode indicates that the selected process has run to completion. A Process
Complete message is displayed in the top right hand corner of the status display.
In addition, an attention warning will sound. The controller remains in this mode
until a reset signal puts it into the Process Ready mode.
5.8.7 MANUAL
This mode is indicated by the red LED behind the Manual key. In this mode the
control voltage output is controlled through the Remote Power Handset. For a
detailed description of this mode, refer to Section 3.5.
5.8.8 SIMULATE
This mode simulates rate and thickness build-up by simulating the sensor input
rather than the actual sensor. Refer to Section 3.4 for more information on the
Simulate Mode.
5.9 STATES
Figure 5-11 shows the different states that make up a complete deposition cycle,
such as Rise to Soak, Rise to Predeposit, etc. The controller moves from state to
state as the deposition progresses.
5.10 TROUBLE, ERROR AND WARNING MESSAGES
Troubles are controller conditions which in most case are indicative of problems
or errors, but may be just warnings. These messages are displayed in the top right
hand corner of the status screen (See Figure 5-3).
In addition, there are three levels of audible warnings associated with the trouble
conditions, Attention, Alert and Alarm. Table 5-1 lists the messages and warning
OPERATING THE MDC-370 5-8