INFICON MDC-370 Thin Film Deposition Controller User Manual
Page 130
MDC-370 DEPOSITION CONTROLLER
Manganese
Mn
7.20
23.42
Manganese (II) Sulfide
MnS
3.99
9.39
Mercury
Hg
13.46
11.93
Molybdenum
Mo
10.20
34.36
Nickel
Ni
8.91
26.68
Niobium
Nb
8.57
17.91
Palladium
Pd
12.00
24.73
Platinum
Pt
21.40
36.04
Potassium Chloride
KC
1.98
4.31
Rhenium
Re
21.04
58.87
Rhodium
Rh
12.41
42.05
Samarium
Sm
7.54
9.92
Scandium
Sc
3.0
9.70
Selenium
Se
4.82
10.22
Silicon
Si
2.32
12.40
Silicon (II) Oxide
SiO
2.13
10.15
Silicon Dioxide (fused quartz)
SiO
2
2.2
8.25
Silver
Ag
10.50
16.69
Silver Bromide
AgBr
6.47
7.48
Silver Chloride
AgCl
5.56
6.69
Sodium
Na
0.97
1.84
Sodium Chloride
NaCl
2.17
5.62
Strontium
Sr
2.620
----
Sulphur
S
2.07
3.86
Tantalum
Ta
16.60
33.70
Tantalum (IV) Oxide
Ta
2
O
5
8.2
29.43
Tellurium
Te
6.25
9.81
Terbium
Tb
8.27
13.38
Thallium
Tl
11.85
5.70
Tin
Sn
7.30
12.20
Titanium
Ti
4.50
14.06
Titanium (IV) Oxide
TiO
2
4.26
22.07
Tungsten
W
19.30
54.17
Tungsten Carbide
WC
15.60
58.48
Uranium
U
18.70
37.10
Vanadium
V
5.96
16.66
Ytterbium
Yb
6.98
7.81
Yttrium
Y
4.34
10.57
Zinc
Zn
7.04
17.18
Zinc Oxide
ZnO
5.61
15.88
Zinc Selenide
ZnS
5.26
12.23
Zinc Sulfide
ZnS
4.09
11.39
Zirconium
Zr
6.51
14.72
THEORY OF OPERATION
10-8