INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 63)

MDC-370 DEPOSITION CONTROLLER
Ramp To Idle
Layer Complete
Process Complete
Process Resume
Events - Event conditions are evaluated true whenever the respective event is
true. Controller Events are:
Abort
Halt
Hold
Time Power
Ready
In Process
Simulate
Time Setpoint
Last Layer
Crystal Failure
Crystal Marginal
Min Rate&Max Pwr
Max Rate&Min Pwr
Rate Dev. Alarm
Rate Est. Error
Source Fault
Sensor Fault
Rate Dev. Alert
Max. Power Alert
Min Power Alert
Rate Dev. Atten.
Max Power Atten.
Min Power Atten.
Inputs - Input conditions are represented by the user defined programmable
inputs. A condition is either true or false depending on the state of the input.
Input conditions are used to indicate the state of something external to the 370.
For example, you may want to program the 370 to wait for a certain pressure
PROGRAMMING AND CONTROLLER SETUP 4-31