INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 38)

MDC-370 DEPOSITION CONTROLLER
c. Motor Driven Inline Source - Select Inline for the Drive type
parameter. Two relay outputs will be created. One called
“SourceN Drive Up” and one called “SourceN Drive Dn”. In this
case the up output will be activated when going from the greatest
pocket to pocket #1.
d. Unidirectional Pneumatic Drive - Select Sngl Step or Dbl Step for the
Drive parameter. A relay output will be created called “SourceN
Drive Up” that should be connected between the rotator’s
pneumatic valve and power supply. With Sngl Step, the output will
pulse once for one second to increment the rotator one position.
With Dbl Step, the output will pulse twice for one second each to
increment the rotator one position.
Indirect Control of Pocket Position - Indirect control means that the MDC-
370 will indicate the desired pocket position to a pocket rotator controller
through position select outputs. The Drive parameter selects between the
two following indirect position output formats:
a. Individual - With individual format, one output will be created
for each pocket. So, if pocket 2 is the desired pocket, then the
output “SourceN Pocket 2” will be true while all the other position
outputs will be false.
b. BCD - With BCD format , the MDC-370 will create from one
to three outputs based on the number of pockets. For example, an
eight pocket source would use three outputs. If pocket one is the
desired pocket, all outputs will be false. If pocket four is the
desired pocket, outputs one and two will be true and output three
will be false.
Position Feedback - The last step in defining automatic control of a multi-pocket
source is to select the pocket position feedback type. The MDC-370 has the
following five types of position feedback available:
No Feedback - As the name implies, no position feedback is created for this
type.
Individual - For this feedback type, one input is created for each pocket
position in the source. The inputs are labeled “SourceN Pocket X”. All
inputs are normally false (open circuit) unless the respective pocket is in
position then that input should be true (closed to ground). For example, a
six pocket source would use six inputs. If pocket two was in position then
all the inputs should be false except the input connected to “SourceN
Pocket 2”.
Individual position feedback is the most typical feedback type and is
recommended if more than one type is available.
BCD - Binary Coded Decimal position feedback. This feedback type uses
binary coding to indicate the pocket position. Inputs are numbered most
significant bit first. For example, an eight pocket source would use three
PROGRAMMING AND CONTROLLER SETUP 4-6