INFICON MDC-370 Thin Film Deposition Controller User Manual
Page 136
MDC-370 DEPOSITION CONTROLLER
Instructs the controller to send the utility parameters to the host computer. A
description of the utility parameter list is as follows:
Parameter Name
Length
(bytes)
Range
DAC#1 Output
1
(22=Rate, 23=RateDev, 24=Pwr, 25=Thk)
DAC#1 Range
1
(26=2 Digit, 27=3 Digit)
DAC#2 Output
1
(22=Rate, 23=RateDev, 24=Pwr, 25=Thk)
DAC#2 Range
1
(26=2 Digit, 27=3 Digit)
Thickness Graph Scale
1
(26=2 Digit, 27=3 Digit)
Crystal Frequency
1
(30=2.5mhz, 31=3.0MHz, 32=5.0mhz,
33=6.0MHz, 34=9.0mhz, 35=10.0MHz)
Data Points/min
1
(38=30 ppm, 39=60 ppm, 40=120 ppm,
41=300 ppm, 42=600ppm)
Simulate Mode
1
(20=Off, 21=On)
Interface Address
1
(1-32)
Attention Volume
1
(0-10)
Alert Volume
1
(0-10)
Alarm Volume
1
(0-10)
Pause on layer
complete
1
(0=No, 1=Yes)
Time To Go Display
1
(72=Estimated Layer, 73=Est. State,
74=Elapsed Process, 75=Elapsed Layer,
76=Elapsed State)
Rate Graph
1
(78=Enabled, 79=Disabled)
Power Graph
1
(78=Enabled, 79=Disabled)
Thickness Graph
1
(78=Enabled, 79=Disabled)
Rate Deviation Graph
1
(78=Enabled, 79=Disabled)
Source/Sensor Status
1
(78=Enabled, 79=Disabled)
I/O Status
1
(78=Enabled, 79=Disabled)
Display Negatives
1
(78=Enabled, 79=Disabled)
Sensor Status Display
1
(80=Thickness, 81=Frequency)
Total 22 bytes
Example: To instruct the controller to send the utility parameters the computer
would send:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(2)+Chr$(0)+Chr$(253)
4. Receive utility parameters (Code #3)
Instructs the controller to enter all the incoming utility parameters into memory.
5. Send controller time (Code #4)
Instructs the controller to send the current time and date to the host computer.
The time and date are sent as strings. A description of the time and date
parameter list is as follows:
COMPUTER INTERFACE
11-6