INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 78)

MDC-370 DEPOSITION CONTROLLER
Figure 5-2 Run Process Selection Screen
From this screen you can change the starting layer number and run number, if
required, using the arrow keys to position the edit cursors, and can then select the
process to start by positioning the cursors on the desired process name, which
then becomes the ‘current’ process. To actually start the process, just press the
Start key again. The controller will then scan the total process definition and the
condition of the system, and if everything appears to be in order will start the
process.
If at this point an error message is presented by the LCD screen, it is likely that
there is a problem somewhere with either the system configuration and/or the
value of a system parameter which will prevent the process from running
correctly. Use the details of the error message as an indication of the corrective
action that should be taken. Press the Abort key to abort the process start, then
the Reset key, and then make the necessary changes.
5.3 STARTING A NEW LAYER
The Start key is also used to start individual layers when the controller is set up
for manual layer sequencing. The controller will prompt the operator to press the
Start key to start the next layer.
5.4 RESUMING AN ABORTED OR HALTED PROCESS
The Start key is also used to resume an aborted or halted process. Pressing the
Start key while the controller is in abort or halt mode will bring up the following
prompt. Note that the green LED behind the Start key is illuminated, indicating
that the process can be resumed. Otherwise, the controller has to be reset, and the
process has to be started over.
Follow the prompt to resume the process.
Press Start to resume process
or Reset to cancel.
Start Process: 01 >Sample <
02
Starting Layer: 001 03
Run Number : 0001 04
05
06
Press Start to start 07
or Reset to cancel. 08
OPERATING THE MDC-370 5-2