INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 61)

MDC-370 DEPOSITION CONTROLLER
A condition string comprises one or more individual conditions linked together by
the logical operators ! NOT, & AND, | OR and parentheses ( ). Conditions are
chosen from a list. To enter a condition string correctly you must follow these
rules:
There must be an equal number of closed and open parentheses.
All conditions must be separated by either the & or the | operator.
Condition strings cannot end in an operator.
To enter a condition string, first move the markers onto the condition string field.
The second line from the bottom of the screen displays the valid operators and
parentheses. The screen symbols will change depending on the contents of the
condition string to the left of the cursor. To select a symbol, press the
corresponding key number. In the example displayed, the bottom line tells you
that you press the “0” key to select a condition or, the Enter key to finish and
validate the string. A blank condition string is evaluated as false.
While entering the condition string, pressing the “0” key will present a screen
which has a list of condition types at the left side. For the chosen type, the right-
hand side of the screen displays a list of sub-conditions or a number entry field.
Example:
If you move the marker of the left column onto the State condition type, a list of
all the possible states will appear in the right column. To select one of the states,
press the right arrow key to move the marker to the right column. You then move
onto the desired state and press enter. This will return you to the previous screen
and add the selected state to the condition string. You can return to the left
column without selecting a state by pressing the Left-arrow key.
Example:
If you move the marker of the left column onto the Layer condition type, a
number field will appear in the right column. To select layer #5, press the Right-
arrow key to move the marker to the right column. You then type the number 5
and press Enter.
Condition >State < >Process Ready <
Type: Event Start Layer
Input Change Pocket
Output Change Crystal
Process Layer Ready
Material Soak Rise
Source Soak Hold
Pocket Predeposit Rise ↓
PROGRAMMING AND CONTROLLER SETUP 4-29