INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 37)

MDC-370 DEPOSITION CONTROLLER
Source Voltage - This parameter must be set to correspond to the input
voltage range of the source power supply (0 to 2.5, 5.0 or 10.0 volts).
The settings of the rest of the source parameters are dependent on whether the
source has one or more pockets (crucibles) and whether pocket selection is
manual or automatic.
Single Pocket Source - If the source has only one pocket (single pocket E-
beam gun, filament boat or sputtering source) then the remaining
parameters can be left at their default values.
Multiple Pocket Source with Manual Position Control - For manual
position control of a multiple pocket source, you need only set the Number
of Pockets parameter to the correct number of pockets. Once set, a
message will appear at the start of each layer instructing the operator to
change source N to the required material.
Multiple Pocket Source with Automatic Position Control - There are two
parameters requiring definition which are common to all the various types
of position control. The first is the Number of Pockets parameter and the
second is the Rotator Delay parameter. The Number of Pockets parameter
is simply the number of pockets in the source. The Rotator Delay
parameter defines the maximum amount of time allowed for the correct
pocket to rotate into position. This should be set to the time it takes for
the rotator to go from pocket #1 all the way around to pocket #1 again.
The settings of the three remaining parameters required for automatic
pocket position control depends on the required type of position control
and position feedback.
Position Control - The MDC-370 can be setup to either control the pocket
position directly by interfacing to the rotator’s actuator or indirectly by
interfacing to a rotator controller.
Direct Control of Pocket Position - Direct control means that the MDC-
370 will control the actuator (rotator motor, pneumatic valve, etc.)
directly to get the desired pocket into position. For direct control first
set the Control Parameter to Direct then select one of the following
drive types and follow the instructions:
a. Unidirectional Motor Drive - The rotator drive motor can only turn in
one direction. Select Up for the Drive parameter. A relay output
will be created called “SourceN Drive Up” that should be connected
between the rotator motor and power supply.
b. Bi-directional Motor Drive - The rotator motor can turn in either
direction. Select Fast for the Drive parameter. Two relay outputs
will be created. One called “SourceN Drive Up” and one called
“SourceN Drive Dn”. With this drive type, the MDC-370 will
activate either the drive up or drive down outputs to rotate to the
required pocket in the least amount of time.
PROGRAMMING AND CONTROLLER SETUP 4-5