INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 34)

MDC-370 DEPOSITION CONTROLLER
4.1.2 ENTERING ALPHA CHARACTERS
To enter a name, press the key that contains the letter or character you wish to
enter. Next, press the Alpha key to change the number to the first letter of that
key. Keep pressing the Alpha key to get the desired letter. Its upper/lower case
can be toggled by pressing the Shift key. Once the desired letter is achieved,
repeat the above procedure and enter the remainder of the name. Note, the
number 9 key contains characters Y, Z, and ‘space’. Use this key to enter a space.
4.1.3 ENTERING TIME PARAMETERS
The MDC-370 expresses time in 24-hour h:mm:ss format. In programming a
time parameter, the Decimal ‘.’ key is used to separate hour, minute and second.
Hence, 1:45:23 would be entered as “1.45.23” and 0:00:35 entered as “..35”,
followed by the Enter key.
4.1.4 COPYING AND DELETING
A ‘process’ is defined by one or more ‘layers’, and a layer requires a ‘material’
and a thickness definition. The MDC-370 has the capability of copying and
deleting processes, layers, and materials. Except when copying a layer,
procedures for copying and deleting a process, a layer and a material are the same.
The difference when copying a layer is that layers are pushed-down to make
space for the new layer, and move up when a layer is deleted.
To copy a process, position the cursor at the process to be copied, then press the
number 1 key. Next, move the cursor to the location where the process is to be
copied and press Enter. The process will be copied to the new location with the
same name. If there is already a process name at the new location, it will be
overwritten. The copied process should be given a new name to avoid
confusion. The same procedure applies when copying a material.
When copying a layer, the copied data will be positioned at the selected layer
number. The data of the selected layer, and all following layers, will be pushed
down one layer. Example, if a layer is copied onto Layer #4 location, the existing
data in Layer #4 will be pushed to Layer #5, Layer #5 to Layer #6, etc., while the
copied data is placed in Layer #4.
To delete a process or a material, move the cursor to the item and press the 0 key.
A message will pop up asking for verification of the deletion, press 1 to confirm
and 0 to cancel the deletion.
4.1.5 PASSWORD PROTECTION
Each Process has a View/Run password and an Edit password. Each Material has
an Edit password. The three passwords protect against unauthorized operations.
The passwords default to 0000, or no password protection, at the time of
shipment. Refer to the descriptions below to set each password. Note: The
password protection is only meant to deter unsophisticated users. Be sure to
record passwords, because if you forget a password it will not be possible to
gain access to the protected item!
PROGRAMMING AND CONTROLLER SETUP 4-2