INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 43)

MDC-370 DEPOSITION CONTROLLER
4.2.7 MATERIAL SETUP
The next step in the initial setup of the controller is to define the materials that
you wish to deposit. Because of its many features, the MDC-370 has a long list of
material parameters which at first can be overwhelming. Fortunately, the default
settings of most parameters are such that the feature they define is disabled when
left at the default. This section will list the material parameters typically set for
all materials and the parameters which must be set to utilize the different features
of the MDC-370. For a detailed description of any material parameter, go to
Section 4.3.2.1.
The following is a list of the material parameters that are typically set when
defining a new material:
Process Name - If you select a material from the default material library (press the
right arrow key from the material name parameter and press enter on the
desired material) then the density and acoustic impedance for that material
will be entered automatically. If your material is not in the library then you
must enter the name, density and acoustic impedance.
Source output and pocket number - Defines the source and pocket number of the
source that the material will be deposited from.
Control loop parameters (Proportional Gain, Integral Time, Derivative Time).
The default settings for these parameters are a good starting point.
Deposit Rate #1 - Defines the target deposit rate for the material.
Maximum Power - Defines the maximum deposit power for the material.
Configure Sensors -
Sensor Weight - Should be left at 100% assuming only one sensor is used for
measurement.
Sensor Tooling - Used to correlate each sensor's rate and thickness readings
with those on the substrates. This parameter should be determined empirically
using the Calibrate Sensors feature described in section 10.6.2.
The above parameters are typically all that are needed to deposit the most basic
materials. If no other features are required then the remaining parameters can be
neglected. The following is a list of the more specialized features defined by the
material parameters. All of the features are disabled by default.
4.2.7.1 POWER RAMPS
Power ramps are used for source material conditioning prior to and after the
deposit states. A power ramp is defined by a ramp time, a ramp too power level
and a hold time before the next state. There are two power ramps available prior
to and one after the deposit states. The first ramp prior to deposit is the soak and
the second is the predeposit. If only one ramp is needed prior to deposit then you
should use the predeposit ramp. The power ramp after the deposit states is called
the Feed.
The parameters used to define the three power ramps are as follows:
PROGRAMMING AND CONTROLLER SETUP 4-11