2 material #2 parameters – INFICON MDC-370 Thin Film Deposition Controller User Manual
Page 27
MDC-370 DEPOSITION CONTROLLER
3.3.2
MATERIAL #2 PARAMETERS
Material Name
Au
Source #
1
Pocket #
2
Material Density
19.30 gm/cm
3
Acoustic Impedance
23.18 gm/cm
2
sec
Tooling Factor
100 %
Proportional gain
5000
Integral Time constant
99.9
Derivative Time constant
0.00
Rise to Soak Time
0:00:05 H:MM:SS
Soak Power
25 %
Soak Time
0:00:05
Rise to Predeposit Time
0:00:05
Predeposit Power
37.5 %
Predeposit Time
0:00:10
Rate Establish Time
0 sec
Rate Establish Error
0 %
Deposition Rate #1
20.0 Å/sec
Rate Start Thickness (1 to 4)
100%
Rate Stop Thickness (1 to 4)
100%
Time Setpoint
0
Ramp to Feed Time
0:00:05
Feed Power
10 %
Feed Time
0:00:10
Ramp to Idle Time
0
Idle Power
0
Maximum Power
50 %
Power Alarm Delay
5 sec
Minimum Power
0 %
Rate Deviation Attention
0 %
Rate Deviation Alert
0 %
Rate Deviation Alarm
0 %
Sample Dwell %
100 %
Sample Period
0:01:00
Sensor #1
TimePower
Sensor #1 Tooling
70 %
Sensor #1 Weight
100 %
Sensor #1 Crystal #
1
Sensor #1 Backup Sensor #
1
Sensor #1 Backup Crystal #
1
Material Password
0000
BENCH CHECKOUT & INSPECTION
3-3