INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 170)

MDC-370 DEPOSITION CONTROLLER
14.1 MATERIAL
Material Number
Material Name
Sensor #
Crystal #
Source #
Pocket #
Material Density
Acoustic Impedance
Tooling Factor
Proportional gain
Integral Time constant
Derivative Time constant
Rise to Soak Time
Soak Power
Soak Time
Rise to Predeposit Time
Predeposit Power
Predeposit Time
Rate Establish Time
Rate Establish Error
Deposition Rate 1
Rate Ramp Start 1
Rate Ramp Stop 1
Deposition Rate 2
Rate Ramp Start 2
Rate Ramp Stop 2
Deposition Rate 3
Rate Ramp Start 3
Rate Ramp Stop 3
Deposition Rate 4
Rate Ramp Start 4
Rate Ramp Stop 4
Deposition Rate 5
Time Setpoint
Ramp to Feed Time
Feed Power
Feed Time
Ramp to Idle Time
Idle Power
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