INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 47)

MDC-370 DEPOSITION CONTROLLER
long as the total number of layers in all the processes is not greater than 999. The
following list describes all of the process parameters:
Process Name (twelve character alphanumeric field)
Each process is referenced by a twelve-character alphanumeric process name.
You enter a process name using the alphanumeric keypad as described in
ENTERING ALPHA CHARACTERS section 4.1.2. Please note that the active
process name is displayed in the upper left-hand corner of all the status screens.
Edit Password (four character alphanumeric field)
The Edit process password allows you to lock out other users from editing a
process unless the correct password is known. To set this password, move the
cursor onto the Edit password field, type in your password then press the Enter
key. A message will pop up asking for verification to change the password. Press
1 to confirm and 0 to cancel the change. Each time you want to edit this process,
you will be asked to enter the correct password. Once a password has been
entered, this parameter will not be displayed until the password has been entered
again.
The default for this parameter is '0000'.
Please note that once the password has been changed, the process cannot be
modified unless the correct password is entered so you must remember your
passwords.
View/Run Password (four character alphanumeric field)
The View/Run process password allows you to lock out other users from viewing
and/or running a process unless the correct password is known. To set this
password, move the cursor onto the Edit password field, type in your password
then press the Enter key. A message will pop up asking for verification to change
the password. Press 1 to confirm and 0 to cancel the change. Each time you want
to view or run this process, you will be asked to enter this password. Please note
that the view function of this password is ignored if the Edit Password is not set.
Once a password has been entered, this parameter will not be displayed until the
password has been entered again.
The default for this parameter is '0000'.
Please note that once the password has been changed, the process cannot be
viewed or run unless the correct password is entered so you must remember
your passwords.
Layer (000 to 999)
This column shows the layer number in the process. Please note that with the
cursors on a layer number you can copy or delete this layer.
Thickness (000.0 to 999.9)
This parameter defines the desired thickness for the layer. The default for this
parameter is 0.000 Kang.
Material
PROGRAMMING AND CONTROLLER SETUP 4-15