6 status displays – INFICON MDC-370 Thin Film Deposition Controller User Manual
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MDC-370 DEPOSITION CONTROLLER
Figure 5-6 Power vs. Time Graph
5.6
STATUS DISPLAYS
There are two run time status screens that can be displayed at any time by
pressing the Status key (providing they have each been enabled in the Edit
Display Setup menu). The first key press will bring up the last viewed status
screen, repeatedly pressing the Status key will cycle through the two status
screens, shown below.
Figure 5-7 Source/Sensor Status screen
The Source/Sensor status screen displays the status of the six sensors and sources
including the crystal or pocket position, source power, crystal health, each
sensor's deposition rate and thickness or frequency. You select either sensor
thickness or frequency in the Edit Display Setup Menu by setting the Sensor
Status parameter. Active sources and the active sensors are indicated with an *
next to the number. A failed sensor/crystal is indicated by “--” in the health field.
The Source/Sensor Status Screen also allows the user to change the source pocket
position, sensor crystal position and the active sensor. You can only change the
source pocket and sensor crystal positions if the 370 is setup for automatic
control. The source pocket position can only be changed while the 370 is in the
Ready mode. To change a source pocket number, simply move the cursor onto
the pocket number of the desired source, enter the new pocket number and press
Sample Cr Process Ready
5
P
o
w
e
r
% 0 1
Sample Cr Process Ready
Src Pckt Power Snsr Xtl Hlth Rate Thick
1* >1< 23.7 1* 1 95 00.0 0.000
2 1 10.0 2 1 99 00.0 0.000
3 00.0 3 -- 00.0 0.000
4 00.0 4 -- 00.0 0.000
5 00.0 5 -- 00.0 0.000
6 00.0 6 -- 00.0 0.000
5-4