INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 36)

MDC-370 DEPOSITION CONTROLLER
4.2.1 UTILITY SETUP
The only critical parameter in the Utility Setup is the Crystal Frequency
parameter. This parameter must be set for the specific frequency crystals that you
plan to use (2.5, 3.0, 5.0, 6.0, 9.0, 10.0 MHz).
There is one other parameter in the Utility Setup menu that may be useful in the
initial setup and testing phase of the MDC-370 and that is the Simulate Mode
parameter. The Simulate mode of the MDC-370 provides a means of simulating
deposition on the crystal. This mode is useful for testing the setup of the MDC-
370 without having to deposit any material.
4.2.2 DAC SETUP
If the DAC (digital to analog) outputs are to be used then these parameters can be
set at this time but it is not necessary for the operation of the controller.
4.2.3 SOURCE SETUP
The first item to note is that in defining sources, and sensors for that matter, is that
the MDC-370 will automatically create the inputs and outputs necessary to
complete the interface based on the parameter settings. Therefore, once the setup
is complete, the user should review the inputs and outputs noting the pin
assignments so that the proper connections can be made. Also note that the I/O
pin assignments can be changed if necessary in the program input and output
screens.
The user must also be aware of the type of I/O card installed in the MDC-370.
There are two types of I/O cards available. Both cards have the same 9 relay
outputs (8 programmable and 1 abort) and the same number of inputs (8
programmable). The difference is the standard card has TTL ground true inputs
while the Active I/O card has 115VAC high true inputs. The Active I/O card is
designated by “Active I/O Card“ written on the rear panel of the MDC-370.
The following two items in the Source Setup are common to almost all types of
sources and typically require definition:
Source Shutter - If the source has a shutter to be activated by the MDC-370
then the Shutter Relay Type parameter must be set to either N.O.
(normally open) or N.C. (normally closed). The typical setting is N.O.
which means that the relay will close to open the shutter.
Once defined, the MDC-370 will create a relay output called “SourceN
Shutter” that should be connected to the shutter actuator. The shutter can
be tested by pressing the Shutter key with the controller in the Process
Ready state. When the red LED in the Shutter key is illuminated then all
source shutters should be opened. When the shutter LED is off then all
source shutters should be closed.
If the shutter actuator has a significant delay in opening and closing then set
the Shutter Delay parameter equal to the delay.
PROGRAMMING AND CONTROLLER SETUP 4-4