INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 9)

Table of Figures
FIGURE 2-1 OPERATING DISPLAY..........................................................................................2-1
FIGURE 2-2 PARAMETER/STATUS DISPLAY .......................................................................2-2
FIGURE 2-3 PROGRAMMING SECTION ..................................................................................2-4
FIGURE 2-4 ARROW KEYS ........................................................................................................2-4
FIGURE 2-5 ALPHANUMERIC KEYBOARD ..........................................................................2-5
FIGURE 3-1 REMOTE POWER HANDSET ..............................................................................3-7
FIGURE 4-1 THE MAIN MENU .................................................................................................4-1
FIGURE 4-2 SELECT PROCESS SCREEN ..............................................................................4-14
FIGURE 4-3 DEFINE PROCESS SCREEN ..............................................................................4-14
FIGURE 4-4 SELECT LAYER MATERIAL SCREEN .............................................................4-16
FIGURE 4-5 SELECT MATERIAL SCREEN............................................................................4-16
FIGURE 4-6 DEFINE MATERIAL SCREEN ............................................................................4-17
FIGURE 4-7 SYSTEM SETUP MENU SCREEN .....................................................................4-24
FIGURE 4-8 DISPLAY SETUP SCREEN .................................................................................4-24
FIGURE 4-9 SELECT OUTPUT SCREEN ...............................................................................4-28
FIGURE 4-10 PROGRAM OUTPUT SCREEN ........................................................................4-28
FIGURE 4-11 SENSOR SETUP SCREEN ................................................................................4-35
FIGURE 4-12 SOURCE SETUP SCREEN ................................................................................4-39
FIGURE 4-13 DAC SETUP SCREEN .......................................................................................4-42
FIGURE 4-14 UTILITY SETUP SCREEN ................................................................................4-42
FIGURE 5-1 SIGN-ON SCREEN ................................................................................................5-1
FIGURE 5-2 RUN PROCESS SELECTION SCREEN ...............................................................5-2
FIGURE 5-3 RATE VS. TIME GRAPH ......................................................................................5-3
FIGURE 5-4 RATE DEVIATION VS. TIME GRAPH ...............................................................5-3
FIGURE 5-5 THICKNESS VS. TIME GRAPH ...........................................................................5-3
FIGURE 5-6 POWER VS. TIME GRAPH ...................................................................................5-4
FIGURE 5-7 SOURCE/SENSOR STATUS SCREEN .................................................................5-4
FIGURE 5-8 I/O STATUS SCREEN ...........................................................................................5-5
FIGURE 5-9 VIEW RESULTS SCREEN ....................................................................................5-6
FIGURE 5-10 RATE VS. TIME PROCESS LOG GRAPH .........................................................5-7
FIGURE 5-11 TYPICAL PROCESS PROFILE .........................................................................5-13
FIGURE 7-1 PASSIVE INPUT BUFFER CIRCUIT ...................................................................7-3
FIGURE 7-2 ACTIVE INPUT BUFFER CIRCUIT ......................................................................7-4
FIGURE 7-3 DAC OUTPUT CIRCUIT .......................................................................................7-5
FIGURE 7-4 SENSOR INPUT BUFFER CIRCUIT ...................................................................7-6
FIGURE 7-5 SOURCE OUTPUT DRIVER CIRCUIT ................................................................7-7
FIGURE 8-1 MDC-370 FRONT PANEL .....................................................................................8-4
FIGURE 8-2 MDC-370 REAR PANEL .......................................................................................8-5
FIGURE 8-3 DAC SOCKET CONNECTOR PIN OUT ..............................................................8-6
FIGURE 8-4 SOURCE SOCKET CONNECTOR PIN OUT .......................................................8-6
FIGURE 8-5 D9S DTE REAR-PANEL RS-232 SOCKET CONNECTOR .................................8-7
FIGURE 8-6 D37P DISCRETE I/O PLUG CONNECTOR ..........................................................8-8
FIGURE 8-7 RJ11 FRONT PANEL RS-232 CONNECTOR ......................................................8-9
FIGURE 8-8 FRONT PANEL MANUAL POWER CONNECTOR ...........................................8-9
FIGURE 8-9 MDC-370 TOP VIEW (COVER REMOVED) .....................................................8-10
FIGURE 9-1 SENSOR OSCILLATOR SCHEMATIC ................................................................9-5
FIGURE 9-2 SENSOR OSCILLATOR OUTLINE ......................................................................9-6
FIGURE 9-3 IF-111 INSTRUMENTATION FEEDTHROUGH OUTLINE ...............................9-7
FIGURE 9-4 SH-102 SENSOR HEAD OUTLINE ......................................................................9-8
FIGURE 9-5 TYPICAL SYSTEM INSTALLATION..................................................................9-9
FIGURE 13-1 PLUG PIN OUT - SOURCE CABLE CONNECTOR .........................................13-1
FIGURE 13-2 PLUG PIN OUT - DAC CABLE CONNECTOR ................................................13-2
FIGURE 16-1 ...............................................................................................................................16-1
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