INFICON MDC-370 Thin Film Deposition Controller User Manual
Page 4
Table of Contents
1.
GENERAL DESCRIPTION ............................................................................................. 1-1
1.1
PURPOSE ....................................................................................................................... 1-1
1.2
FEATURES .................................................................................................................... 1-1
1.2.1
MULTI-CRYSTAL AVERAGING ............................................................................... 1-1
1.2.2
EXTENSIVE PROGRAM STORAGE ......................................................................... 1-1
1.2.3
DYNAMIC MEASUREMENT UPDATE RATE .......................................................... 1-1
1.2.4
SUPERIOR GRAPHICS DISPLAY ............................................................................ 1-1
1.2.5
PROGRAM SECURITY .............................................................................................. 1-1
1.2.6
DESIGNED FOR UNATTENDED OPERATION ...................................................... 1-1
1.2.7
FAIL SAFE ABORTS .................................................................................................. 1-2
1.2.8
ABORT STATUS RETENTION .................................................................................. 1-2
1.2.9
RUN COMPLETION ON CRYSTAL FAILURE ......................................................... 1-2
1.2.10
POWERFUL SYSTEM INTERFACE ..................................................................... 1-2
1.2.11
POWER SUPPLY NOISE TOLERANCE ............................................................... 1-2
1.2.12
INTERNATIONAL STANDARD POWER CONNECTOR ..................................... 1-2
1.2.13
FIELD UPGRADABLE ......................................................................................... 1-2
1.3
SPECIFICATIONS ......................................................................................................... 1-3
1.3.1
MEASUREMENT ....................................................................................................... 1-3
1.3.2
DISPLAY .................................................................................................................... 1-3
1.3.3
COMMUNICATION................................................................................................... 1-3
1.3.4
PROGRAM STORAGE CAPACITY ........................................................................... 1-3
1.3.5
PROCESS PARAMETERS ......................................................................................... 1-3
1.3.6
MATERIAL PARAMETERS ....................................................................................... 1-4
1.3.7
INPUT/OUTPUT CAPABILITY ................................................................................. 1-5
1.3.8
SENSOR PARAMETERS ............................................................................................ 1-5
1.3.9
SOURCE PARAMETERS ........................................................................................... 1-6
1.3.10
RECORDER PARAMETERS ................................................................................. 1-6
1.3.11
UTILITY SETUP PARAMETER ............................................................................ 1-6
1.3.12
OTHER .................................................................................................................. 1-6
1.4
ACCESSORIES .............................................................................................................. 1-7
2.
FRONT PANEL DISPLAYS AND CONTROLS ........................................................... 2-1
2.1
OPERATING
DISPLAYS .............................................................................................. 2-1
2.1.1
RATE .......................................................................................................................... 2-1
2.1.2
POWER ...................................................................................................................... 2-1
2.1.3
THICKNESS ............................................................................................................... 2-1
2.1.4
LAYER NUMBER ....................................................................................................... 2-1
2.1.5
CRYSTAL HEALTH % ............................................................................................... 2-2
2.1.6
TIME DISPLAY .......................................................................................................... 2-2
2.2
PARAMETER/STATUS
DISPLAYS ............................................................................ 2-2
2.3
OPERATING
CONTROLS ............................................................................................ 2-2
2.3.1
MANUAL KEY ........................................................................................................... 2-2
2.3.2
START KEY ................................................................................................................ 2-3
2.3.3
ABORT KEY ............................................................................................................... 2-3
2.3.4
RESET KEY ................................................................................................................ 2-3
2.3.5
ZERO KEY ................................................................................................................. 2-3
2.3.6
SHUTTER KEY .......................................................................................................... 2-3
2.3.7
STATUS KEY .............................................................................................................. 2-3
2.3.8
GRAPH KEY .............................................................................................................. 2-4
2.3.9
ARROW KEYS ............................................................................................................ 2-4
2.3.10
PROGRAM KEY .................................................................................................... 2-4
2.3.11
ALPHANUMERIC KEYBOARD ............................................................................ 2-5
3.
BENCH CHECKOUT & INSPECTION ......................................................................... 3-1
iv